Laser induced chemical vapor deposition of metals for electrical contacts in semiconductor processing
Pyrolytic and photolytic laser chem. vapor deposition of Cu, Pt, Ga, and Sn was studied for the prodn. of low-resistance ohmic contacts of very small dimensions.
1985
9783662135716
38
43
Copyright 2003 ACS
CAPLUS
AN 1985:497072
CAN 103:97072
76-2
Electric Phenomena
Inst. Chim. Phys.,Ec. Polytech. Fed. (ETH),Lausanne,Switz. FIELD URL:
Journal
SSOSDB
written in English.
Metals Role: DEV (Device component use), PEP (Physical, engineering or chemical process), TEM (Technical or engineered material use), PROC (Process), USES (Uses) (chem. vapor deposition of, laser-induced, for elec. contacts in semiconductor devices); Semiconductor devices (laser-induced chem. vapor deposition of elec. contacts for); Electric contacts (laser-induced chem. vapor deposition of, for semiconductor devices)
REVIEWED
EPFL